Scanning TCT
Scanning-TCT is similar to conventional TCT, but the laser beam is narrow and focued to few microns. The optics and samples are mounted on the XYZ stages, which allows for scanning the detector surface of edge with laser light. Particulars offer a very powerfull system with excellent postion resolution and beam width. The system offers the state of the art performance for semiconductor sensor studies, MOS transistors, studies of semiconductor properties.
| Component | Parameter | Properties |
|---|---|---|
| Laser | ||
| Laser diode | ||
| wavelength: | 660 nm, 1064 nm (optional others) | |
| pulse power: | few m.i.p. - 100 m.i.p. (equivalent in 300 micron Si) | |
| pulse width: | <350 ps - 4000 ps (tunable) | |
| coupling: | single core fibre | |
| Driver | ||
| control: | with PC over USB | |
| running mode: | single pulse: 50 Hz - 1MHz | |
| patter mode: mHz to 100 kHZ | ||
| 1024 bits deep sequence of pulses | ||
| minimum distance between two pulses 440 ns | ||
| external control: | external NIM logical signal | |
| I/O: | ext. trigger in/trigger out MC/trigger out laser | |
| Optics | ||
| beam spot (FWHM): | <11 microns@1064 nm, <8 microns@660 nm | |
| coupling: | fibre coupled | |
| attenuation: | through collimator on beam-expander | |
| Mechanics | ||
| size: | <12 microns@1064 nm, <8 microns@650 nm | |
| translation: | 3-axis computer controlled | |
| load/stage: | 2 kg | |
| moving range: | 5 cm x 5 cm x 5cm (x,y,z) | |
| position resolution: | < 1 micron | |
| Control: | via USB | |
| Electronics | ||
| amplifier: | 53 dB | |
| Bias-T range: | >1000 V | |
| frequency range: | <0.3 MHz->3000 MHz | |
| Mounting brackets | ||
| cooling type: | Peltier element | |
| heat remover: | water / inlets provided | |
| cooling power: | 40W (dT~40C) | |
| test sample box: | 2.5x3 cm2 - other sizes optional | |
| mounting plane: | 5 cm x 5 cm | |
| Software | ||
| Full DAQ: | adaptation for specific oscilloscope, power source on demand | |
| analysis software: | root based package |